JPH0345957U - - Google Patents
Info
- Publication number
- JPH0345957U JPH0345957U JP10587189U JP10587189U JPH0345957U JP H0345957 U JPH0345957 U JP H0345957U JP 10587189 U JP10587189 U JP 10587189U JP 10587189 U JP10587189 U JP 10587189U JP H0345957 U JPH0345957 U JP H0345957U
- Authority
- JP
- Japan
- Prior art keywords
- mass flow
- main pipe
- flow rate
- flow controller
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10587189U JPH0345957U (en]) | 1989-09-08 | 1989-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10587189U JPH0345957U (en]) | 1989-09-08 | 1989-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0345957U true JPH0345957U (en]) | 1991-04-26 |
Family
ID=31654626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10587189U Pending JPH0345957U (en]) | 1989-09-08 | 1989-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345957U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002110570A (ja) * | 2000-10-04 | 2002-04-12 | Asm Japan Kk | 半導体製造装置用ガスラインシステム |
| JP2012241222A (ja) * | 2011-05-18 | 2012-12-10 | Ihi Corp | ガス分岐装置およびガス分岐方法 |
-
1989
- 1989-09-08 JP JP10587189U patent/JPH0345957U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002110570A (ja) * | 2000-10-04 | 2002-04-12 | Asm Japan Kk | 半導体製造装置用ガスラインシステム |
| JP2012241222A (ja) * | 2011-05-18 | 2012-12-10 | Ihi Corp | ガス分岐装置およびガス分岐方法 |